Cooling Water Cabinets

Cooling Water Cabinets

Usage of ultra-pure-water (UPW) in the tool circuit.

Environmental Control Chamber

Precise Environmental Chamber

Precise environmental chamber for controlled process environments.
 

Climate Control System

Precision Climate-Control System

The right climate ensures quality and reduces the rejection rate in production. 
Dew Point Control System

Dew Point Control Solution

System solution for the dew point control of critical humidity production.

Ultrapure Water Conditioning

Ultrapure Water Conditioning

Precise conditioning of fluid media at innovative production environments.

Cleanroom Facility
Cleanroom

Superior solutions and comprehensive services

mini environments
Mini Environments
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Air Handling Units
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Critical Subsystems & Controlled Environments
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Gas Supply
chemical supply
Chemical Supply

Ultra-high purity chemical & slurry blending and distribution systems

NSI level sensor
Ampoules and Sensors
Process Exhaust
Process Exhaust