The Exentec systems for supplying gas to laboratories and production plants are available in different configurations depending on customer requirements: Individual components, integrable system groups or ready-to-use complete systems are designed and manufactured by Exentec based on customer requirements with expert know-how. Optional integration into central control, safety or monitoring systems is possible via various bus systems.
Gas cabinets and stations
Exentec offers several gas cabinets with different levels of automation for different usage profiles. All are also available as stand-alone solutions and are characterized by great flexibility in various areas of application while meeting the highest safety standards and requiring minimal space.
- Fully automatic gas cabinets and stations can be conveniently programmed and controlled via touch panel. They are easy to integrate into the existing infrastructure, be it control, monitoring or alarm systems.
- Semi-automatic gas cabinets and stations offer integrated control programs and allow serial system networking. Central connection to the control technology is possible via common protocols and media.
- Manually controlled gas cabinets and stations are a cost-effective option, for example when there are long cycles between cylinder changes. Here, operation is carried out via SOP instructions.
Extraction, distribution and connection systems
In addition to VMPs, VMBs and cabinets, the Exentec gas supply product portfolio also includes extraction systems and machine connections/hook ups.
Gas Supply Products Overview
High Purity Bulk Gas Systems
Pressure Control & Filtration Modules
LCO2 and HPLCO2
High Purity Spec Gas Systems
Gas Cabinets
High Pressure
Low Pressure
High Flow
Liquified Gases
Gas Blenders
Valve Manifold Boxes (VMB)
Valve Manifold Panel (VMP)
Bulk Spec Gas Systems
Liquide (precursor) Delivery Systems
Controllers
Vapor Delivery Systems
Customized Gas Supply Container
Bulk Gas Racks
And Equipment Installation Services
High Purity Bulk Gas Systems
Our gas systems portfolio offers a diverse line of ultra-high purity gas handling equipment and support services. Our mass customizable gas systems are designed to maximize efficiency, increase overall lifetime and lower life cycle cost for your high purity process utility equipment. Our equipment can provide advantages in:
- Safety
- Productivity
- Environmental compliance
- Product quality
High Purity Spec Gas Systems
Our high purity spec gas systems come equipped with advanced functionality and capabilities including an open, fully integrated PLC and HMI panel, with connectivity and networkability, operational sequences, and automated pressure control.
Compact I/O and processor to fit into small cabinet Provides remote access to all parameters within the gas delivery control system Provides continuous gas flow with minimal technician intervention Automatically controls supply point pressure Automated gas delivery pressure control Automated pressure control eliminates need to open cabinet for manual adjustments, improving safety Precise automated controls provide consistent flow, improving process control
Gas Cabinets
A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, extensive options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. Exentec also provides custom systems and solutions.
The family of controllers includes a manual switch for cylinder changeover, a semi-automatic changeover that monitors pressure or cylinder weight and fully automated changeover.
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Inert, toxic hazardous gases; semi-auto or fully automatic
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Cabinet or rack-mounted
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Single-, dual- and multiple-process panel configurations
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Optional purge panel with proven purge procedure
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Engineered to process requirements
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Relay logic to override PLC for fire, leak shutdowns, etc.
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Modular construction improves service and maintenance
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SEMI-S2 compliant
Gas Blender Systems
The Exentec Gas Blender is a closed-loop, control-based gas blending system combined with a built-in analyzer. It provides an accurate blend ratio at variable flow rates up to 250 slpm. These features, combined with intuitive PLC control software and a user-friendly touch-screen HMI, provide a safe, reliable and versatile gas mixing system.
The Exentec Blender System expands on standard gas mixing technology by combining an MFC mixing system, surge tank, concentration analyzer and our innovative Power Purge V controller. The automated system maintains operation within the user-defined system parameters. The system is capable of providing consistent results with varying flow rates and adjustable blend ratios.
Valve Manifold Boxes
Valve Manifold Panels
Exentec’s high-purity media supply team has extensive experience manufacturing and installing high-purity gas panels and equipment. Our experience enables us to consistently provide innovative, reliable and safe gas equipment to meet our customers’ process requirements. We offer the following gas panel types:
- Auto-Crossover Panels
- AN Series – Automatic Panels
- M Series – Stand-alone Manual Panels
- MN Series – Modular Manual Panels
- VGP Series – Purge Panels
Bulk Specialty Gas Systems
The Bulk Specialty Gas System (BSGS) is a state-of-the-art distribution system designed for safe, automatic delivery of bulk specialty gases. The PLC-based controller provides the operator with intuitive, easy-to-use touchscreen and on-screen prompts to simplify operator interaction.
- Inert, toxic, hazardous gases; semi-auto or automatic PLC-based control
- Single- or double-process panels with optional purge panel
- Supply from cylinder bundles, y-cylinders, tube trailer, tank
- Automatic crossover with configurable auto-purge
- Relay logic to override PLC for fire, leak & facility shutdowns
- High-flow and ultra-highflow design
- SEMI-S2 compliant
Liquide Precursor Delivery Systems
Exentec’s Liquide (precursor) Delivery System is a chemical distribution system designed to maximize efficiency and performance. The stand-alone system includes redundant panels with auto-crossover capability for increased uptime > 99.9%. The small footprint with large process capacity is designed to distribute liquid chemical via a push gas.
- PLC-based control with touch-screen interface
- Complete startup, canister & line purge routines
- Adjustable shelf for canister options up to 20 liter
- Semi-compliant system and controller
- Tool interface for System OK, Request Chem and/or Purge
- BPSG: TEOS, TEB, TEPO
Gas Delivery System Controllers
Exentec controllers specified for use in valve manifold boxes (VMBs) meet the needs of specific gas and chemical distribution applications, with options including stick counts and semiautomatic vs. automatic capabilities.
- AVMB4S Controller is adaptable to meet the needs of ultra-high-purity gas delivery systems
- AVMB8S Controller extends life-aging equipment - a cost-effective alternative to replacing an entire gas delivery system.
Vapor Delivery System
The system distributes vapor via a carrier gas. Feedback from a linear level sensor maintains the vessel at the set point. A sparge diffuser bubbles carrier gas to maximize saturation. A temperature probe & chiller maintain the chemical at the set point to maximize process control.
Customized Gas Supply Container
Cleanroom
Superior solutions and comprehensive services
We develop, produce and maintain reliable cleanroom products and production environments for ultra-clean controlled atmospheres.
Air Handling Units
Air Handling Units from Exentec are distinguished by energy-efficient design. Our research and development team works with state-of-the art equipment and always contributes the latest knowledge.
Critical Subsystems and Controlled Environments
Pure media supply systems for sensitive products
Sensors and Ampoules
State-of-the-art ampoules, pyrophoric chemical handling and liquid level sensors.
We manufacture liquid level sensors, pyrophoric chemical handling and DOT 4B ampoules, cylinders and canisters widely used in the semiconductor, photovoltaic and battery industries.
