Exentec specializes in ultra-high purity chemical supply systems for the semiconductor industry. Our product portfolio includes blending and delivery equipment for many applications in aqueous chemicals and CMP slurries. In addition to our deep expertise in design and manufacturing, we also provide the required field support services, controls, integration, and technical expertise to meet stringent semiconductor process control needs.
Our integrated high-volume-manufacturing (HMV) reliable chemical systems provide precision flow, blending, distribution and advanced metrology driven control. With fully automated QC and integrated metrology operation with extensive instrumentation and control capability we maximize unit reliability, accuracies and maximize Fab up time. We integrate our systems into SCADA and FMS systems to run fully controlled processes.
Our specialties include:
- Metrology-driven closed loop process control
- Flexible, Scalable and Precise Gas & Chemical Delivery and Blending Systems
- Increased Process Control via Blend Concentration and Pressure Control
- Seamless Integration into SCADA with Full I&C Support
High Purity Chemical Systems
- Improve processes
- Optimize floor space
- Minimize downtime
- Extend product life lowering overall cost of ownership
Offload
- Fully automated systems
- Low cost of ownership
- Flexible and user-friendly HMIs
- Space efficient designs
- Continuous transfer of chemical from the main tanks to the production area distribution tanks
- System and/or component redundancy as required to maximize production uptime
- Monitors and controls:
- Tanker offload functionality
- Tank levels during offloads and normal operation
Chemical Distribution
- Bulk Chemical Systems (Tanker off-load)
- Single or Multiple Drum Systems
- Tank Systems (Centrifugal and Pneumatic)
- Pressure Vessel Systems
- Mobile Delivery Systems
In-line Blending
Generation
CMP Slurry Blending & Delivery
Cleanroom
Superior solutions and comprehensive services
We develop, produce and maintain reliable cleanroom products and production environments for ultra-clean controlled atmospheres.
Air Handling Units
Air Handling Units from Exentec are distinguished by energy-efficient design. Our research and development team works with state-of-the art equipment and always contributes the latest knowledge.
Critical Subsystems and Controlled Environments
Pure media supply systems for sensitive products
Sensors and Ampoules
State-of-the-art ampoules, pyrophoric chemical handling and liquid level sensors.
We manufacture liquid level sensors, pyrophoric chemical handling and DOT 4B ampoules, cylinders and canisters widely used in the semiconductor, photovoltaic and battery industries.
