Dew Point Control Solution
Dew Point Control Solution
Exentec offers systems and solutions with displacement gases for the highest requirements regarding cleanliness, temperature stability and dryness.
Cooling Water Cabinets
Exentec's solution is to separate the cooling circuits of fab and tool, and usage of Ultra-Pure-Water (UPW) in the tool circuit.
Precise Environmental Control Chamber
Exentec Precise Environmental Chambers provide very low temperature and humidity tolerances, absolute cleanliness in regards to gaseous and particulate contamination and shielding of acoustic, vibrational and electromagnetic influences.
Precision Climate Control Systems
Exentec provides Precision Climate Control System for the semiconductor industry and nanotechnology and the production of optical storage media requiring a consistently stable process and measurement environments.
Dew Point Control Solution
Exentec offers systems and solutions with displacement gases for the highest requirements regarding cleanliness, temperature stability and dryness.
Ultrapure Water Conditioning
Precise conditioning of fluid media at innovative production environments.
System solution for the dew point control
Certain production processes require more than absolute purity and stable process parameters. Especially, this includes optical applications where additional disturbing influences such as from oxygen and water need to be eliminated from the air to assure optimal images.
Undesirable gases and water are substituted, for example by dry nitrogen gas. Exyte Technology offers systems and solutions with displacement gases for the highest requirements regarding cleanliness, temperature stability and dryness.
- Extremely dry process environment (- 35 °C)
- "oxygen free" process environment
- Stable and reproducable process climatization
Constructive Design
- Typical application: humidity sensitive production processes
- Customer needs: Very dry and oxygen free environmental conditions
- Flow rate: 3,600 m³/h
- Process Air temperature: 20 °C
- Temperature stability: ± 1K
- System dew point: - 35°C
- Humidity: 1,3 %r.H.
- Residual oxygen: < 0,8 %