Dew Point Control Solution| Products

Dew Point Control Solution

Exentec offers systems and solutions with displacement gases for the highest requirements regarding cleanliness, temperature stability and dryness

System solution for the dew point control

Certain production processes require more than absolute purity and stable process parameters. Especially, this includes optical applications where additional disturbing influences such as from oxygen and water need to be eliminated from the air to assure optimal images.

Undesirable gases and water are substituted, for example by dry nitrogen gas. Exyte Technology offers systems and solutions with displacement gases for the highest requirements regarding cleanliness, temperature stability and dryness.

Extremely dry process environment (- 35 °C)
"oxygen free" process environment
Stable and reproducable process climatization

Constructive design

Typical application: humidity sensitive production processes
Customer needs: Very dry and oxygen free environmental conditions
Flow rate: 3,600 m³/h
Process Air temperature: 20 °C
Temperature stability: ± 1K
System dew point: - 35°C
Humidity: 1,3 %r.H.
Residual oxygen: < 0,8 %

Cooling Water Cabinets

Exentec's solution is to separate the cooling circuits of fab and tool, and usage of Ultra-Pure-Water (UPW) in the tool circuit.

Precise Environmental Control Chamber

Exentec Precise Environmental Chambers provide very low temperature and humidity tolerances, absolute cleanliness in regards to gaseous and particulate contamination and shielding of acoustic, vibrational and electromagnetic influences.

Precision Climate Control Systems

Exentec provides Precision Climate Control System for the semiconductor industry and nanotechnology and the production of optical storage media requiring a consistently stable process and measurement environments.

Dew Point Control Solution

Exentec offers systems and solutions with displacement gases for the highest requirements regarding cleanliness, temperature stability and dryness.

Ultrapure Water Conditioning

Precise conditioning of fluid media at innovative production environments.