Cooling Water Cabinets
Cooling Water Cabinets
The quality of the process cooling water available in semiconductor fabs is a significant issue.
Cooling Water Cabinets
Exentec's solution is to separate the cooling circuits of fab and tool, and usage of Ultra-Pure-Water (UPW) in the tool circuit.
Precise Environmental Control Chamber
Exentec Precise Environmental Chambers provide very low temperature and humidity tolerances, absolute cleanliness in regards to gaseous and particulate contamination and shielding of acoustic, vibrational and electromagnetic influences.
Precision Climate Control Systems
Exentec provides Precision Climate Control System for the semiconductor industry and nanotechnology and the production of optical storage media requiring a consistently stable process and measurement environments.
Dew Point Control Solution
Exentec offers systems and solutions with displacement gases for the highest requirements regarding cleanliness, temperature stability and dryness.
Ultrapure Water Conditioning
Precise conditioning of fluid media at innovative production environments.
Fab and tool installations demand precise cooling water control
Exyte Technology´s solution is to separate the cooling circuits of fab and tool and use Ultra-Pure-Water (UPW) in the tool circuit. This separation also enables a better control of the cooling water supply in regards to temperature stability, particle contamination and flow rate, which increases the tool performance and availability.