Exentec’s Vapor Delivery System is a compact, standalone solution for efficient and precise chemical vapor distribution. It includes a stainless steel bubbler vessel, optional integrated chiller, and system controller—all within a small footprint. Facility, carrier gas, and process connections can be configured from multiple sides for flexible installation.

System Overview:

• Carrier gas bubbles through liquid chemical in the vessel using a sparge diffuser for high vapor saturation
• Active linear level sensor maintains the setpoint liquid level
• Temperature control via probe and optional chiller ensures consistent vapor delivery

Enclosure Specifications:

• Size: 16” W x 16” D x 74.25” H with 3” exhaust
• Durable 11-gauge steel with corrosion-resistant coating
• Welded inner enclosure for chemical containment
• Louvers and rear plenum for effective gas evacuation
• Separate zones for electrical, chiller, and gas components
• Safety features: Exhaust sensor, UL sprinkler, rate-of-rise fire sensor, gasketed doors

Available Options:

• Bubbler sizes: 1, 5, 10, or 20 liters
• Integrated chiller
• Reclaim options: Manual or remote drain, reclaim line
• Carrier gas stick: Optional pressure gauge/transmitter, bypass, ESO valve

Exentec’s UHP bubbler vessels support high-performance vapor delivery in semiconductor, solar, and related advanced manufacturing processes such as ALD, PEALD, CVD, and epitaxy.