Gas Cabinets

Gas Cabinets

A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, extensive options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. Exentec also provides custom systems and solutions in circumstances where standard configurations are not sufficient. The family of controllers includes a manual switch for cylinder changeover, a semi-automatic changeover that monitors pressure or cylinder weight and fully automated changeover, complete with user-configurable alarms and operating parameters, such as timers and set points.

Contact us for assistance in developing a system that meets your needs.

High Pressure
Low Pressure
High Flow
Liquified Gases

Features & Benefits

Inert, toxic hazardous gases; semi-auto or fully automatic with a touchscreen interface
Cabinet or rack-mounted
Single-, dual- and multiple-process panel configurations
Optional purge panel with purge procedure proven in corrosive applications, such as F2, HF, HCl, and WF6
Engineered to process requirements
Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
Modular construction improves service and maintenance
SEMI-S2 compliant

Controller Options

Manual switch for automatic cylinder changeovers
Semi-auto systems with automatic switchover
Fully automated systems with purge routines

Cabinet Options

1-,2-, and 3-cylinder gas rack
1-,2-, and 3-cylinder gas cabinet

Panel Options

Purge panel
Regulator
Purifiers
Pressure switch
Transmitter
Process panel
Manual panels, 3–8 valves
Automatic panels, 5–8 valves
Purifiers & filters
Pressure switches
Transmitters
Flow switches
Test valves
Manual isolation valves
Emergency shutoff valves

Gas Cabinet Enclosure

M1 & 2 cylinder: 26’’ W x 28” D x 90” H with 6” exhaust
3 cylinder: 42” W x 28” D x 90” H with 6” exhaust

Safety Options

UV/IR sensor
Temperature switch
Leak sensor
Door interlocks
Remote shutdown relays
EMO
Sprinklers
Heat
Cool (Chiller)

High Purity Bulk Gas Systems

We offer our customers a reliable source of high-quality gas system equipment, and a broad range of products and services.

High Purity Spec Gas Systems

We utilize our build capacity and programming expertise to develop game-changing spec gas delivery systems.

A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs.

Gas Blender Systems

The Exentec Gas Blender is a closed-loop, control-based gas blending system combined with a built-in analyzer.

Valve Manifold Boxes

The Exentec Valve Manifold Box (VMB) provides safe and reliable distribution points for a gas system.

Valve Manifold Panels

Exentec's high-purity media supply team has extensive experience manufacturing and installing high-purity gas panels and equipment.

Bulk Specialty Gas Systems

The Bulk Specialty Gas System (BSGS) is a state-of-the-art distribution system designed for safe, automatic delivery of bulk specialty gases.

Liquide Precursor Delivery Systems

Exentec's Liquide (precursor) Delivery System is a chemical distribution system designed to maximize efficiency and performance.

Gas Delivery System Controllers

The available options for our family of controllers increase in specificity as the needs and demands change with the end user.

Vapor Delivery System

Exentec's Vapor Delivery System is a chemical vapor distribution system designed to maximize efficiency and performance.

Customized Gas Supply Container

Exentec's complete solutions in the technical/safety container are ideal for a variable and flexible gas supply.