AMC Filters

AMC Filters

Exentec is one of the pioneers in the development of AMC filters

A special challenge in highly clean production environments (i.e. semiconductor manufacturing) is removal of Airborne Molecular Contamination (AMC), such as acids, bases, condensables and dopants from the process air. These can lead to undesired chemical reactions on the wafer surface and process equipment. Being one of the pioneers in the development of AMC filters, Exentec offers a comprehensive variety of different filtration products for various application areas, like make-up air or return air filters filters for cleanroom ceilings or for tool and process protection.

The products are engineered in our in-house technology center and are qualified and optimized in all relevant aspects such as filter capacity (= max lifetime), highest removal efficiency (= max process protection), lowest pressure drop (= energy saving), lowest outgassing and particle development.

INX/PCF-ABCD

INX/PCF-ABCD with metal frame containing media combination for removal of all possible Airborne Molecular Contamination AMC’s. This combination of ion exchange media with impregnated activated carbon material merges the best of all filter technologies to remove the complete range of AMC within one filter housing. This combination filter merges the best of all filter technologies and enables high removal efficiency and a long useful filter lifetime.

R-PCF-CD

R-PCF-CD are compact filters for the treatment of Volatile Organic Compounds (VOC’s). This model of the PCF series is equipped with a massive amount of very high-quality activated carbon medium, which leads to longest possible filter lifetime and high removal efficiencies even at low inlet concentrations. Therefore, it provides optimum protection for the critical processes of the semiconductor and flat panel industry. Due to the intelligent design the pressure drop is kept extremely low, which helps saving electricity cost.

INX-A

INX-A with metal frame containing various granular or fibrous ion-exchange media with anion-exchange medium for removal of acids. This leads to very high removal efficiency as well as an unmatched high capacity and thus to a long effective filter lifetime. The filter also features a very low pressure drop, which helps keeping energy costs low.

INX-B

INX-B with metal frame containing various granular or fibrous ion-exchange media with cation-exchange medium for removal of bases. This leads to very high removal efficiency as well as an unmatched high capacity and thus to a long effective filter lifetime. The filter also features a very low pressure drop, which helps keeping energy costs low.

CCF-CD

CCF-CD with polystyrene frame containing activated carbon media with highly activated carbon for removal of condensables resp. VOC’s.

CCF-ACD

CCF-ACD with polystyrene frame containing impregnated carbon media for removal of acids as well as condensables / VOC’s. This filter is a V-shaped filter with pleated, impregnated activated carbon material. It is characterized by low pressure drop and high adsorption and is used for the removal of acidic contaminants. The filter is fully incinerable.

CCF-ACD

CCF-BCD with polystyrene frame containing impregnated carbon media with impregnated carbon for removal of bases as well as condensables / VOC’s. This filter is a V-shaped filter with pleated, impregnated activated carbon material. It is characterized by low pressure drop and high adsorption and is used for the removal of alkaline contaminants. The filter is fully incinerable.

IXV-AB

IXV-AB with polystyrene frame containing various granular of fibrous ion-exchange media. The IXV-AB is an AMC filter for highly efficient acidic and alkaline removal. Equipped with Exentec’s proprietary fibrous an- and cation-exchanger materials. The filter features very high removal efficiencies for the targeted substances.

Filter Fan Units

Exentec has been a pioneer in filter fan unit systems since 1990

Control Systems

Our professional experience in control systems includes more than 50 years in design and installation of cleanrooms

Cleanroom Ceiling Systems

All the parts used in our ceiling systems were designed to perfectly match one another

Raised Floor Systems

Exentec offers Raised Floor Systems which fulfill the high requirements of state-of-the-art cleanrooms

Air Shower Systems

These air shower systems offer a high cleaning effect and are designed for use with all cleanroom classes.

Clean Work Areas

The Modular Cleanroom System is a fully operative cleanroom as a room-in-a-room system with a vertical unidirectional or turbulent airflow

Accessories

Exentec offers a wide range of accessories for the perfect cleanroom. From curtains and Lightings to air outlet and sprinkler.

Exentec is one of the pioneers in the development of AMC filters