Exentec is the supplier of choice for major semiconductor companies around the world, providing Point-of-Use (POU) abatement (gas scrubber) solutions for deposition, etch and diffusion process tools.
Our systems are some of the most efficient and reliable Epi scrubbers available. We combine inlet device technology with a PLC-based control box and automated gas inlet plunger to produce a low-maintenance Epi scrubber. This performance results in higher uptime, greater process stability and increased safety. Our scrubbers combine 2 spray chambers and a packed column to produce some of the highest efficiencies in the industry.
Encompass
Cyclone
Exentec's Cyclone wet abatement system is our deluxe scrubber model which includes all of the advanced features that support zero scrubber-related process tool downtime.
Cyclone XL
Our newest high-capacity, high-efficiency wet scrubber, the Cyclone XL features a coarse-spray, high-flow nozzle that coats the first scrubbing chamber and removes bulk impurities. Strategic position increases efficiency, minimizes water use and eliminates foam.
Inlet Devices
Cleanroom
Superior solutions and comprehensive services
We develop, produce and maintain reliable cleanroom products and production environments for ultra-clean controlled atmospheres.
Air Handling Units
Air Handling Units from Exentec are distinguished by energy-efficient design. Our research and development team works with state-of-the art equipment and always contributes the latest knowledge.
Critical Subsystems and Controlled Environments
Pure media supply systems for sensitive products
Sensors and Ampoules
State-of-the-art ampoules, pyrophoric chemical handling and liquid level sensors.
We manufacture liquid level sensors, pyrophoric chemical handling and DOT 4B ampoules, cylinders and canisters widely used in the semiconductor, photovoltaic and battery industries.
