High Purity Chemical Systems
High Purity Chemical Systems
Exentec offers equipment, field support service and technical expertise to meet various application needs of high purity fluid delivery, chemical blending and state-of-the-art CMP slurry systems for semiconductor manufacturing and other high-tech industries
We can provide chemical and CMP slurry systems for:
· Offload
· Distribution
· Blending (in-line and batch)
· Chemical generation
Our specialties include:
· Metrology-driven closed loop process control
· Flexible, scalable and precise chemical delivery and blending Systems
· Increased process control via blend concentration and pressure control
· Seamless integration into SCADA with full I&C support
High Purity Chemical Systems
We offer equipment, field support service and technical expertise to meet various application needs of high purity fluid delivery, chemical blending and state-of-the-art CMP slurry systems for semiconductor manufacturing and other high-tech industries.
Chemical Offload
The Exentec Titan™ Transfer and Offload System automatically transfers an aqueous chemical from the tanker offload cabinet to the main distribution tanks.
Chemical Distribution
Exentec offers equipment, support service and technical expertise to meet application needs in the design and manufacturing of high and low purity chemical distribution systems.
In-Line Blending
Exentec's patented on-demand in-line chemical blending and supply of chemical solutions technology can accommodate on-demand dynamic change in flow rates by the end users or points of use while maintaining precise blend accuracy.
Chemical Generation
Exentec's NH4OH on-site chemical generation technology helps semiconductor fabs to significantly reduce their overall chemical supply costs, improve resiliency and increase ecological sustainability.