Semiconductor fabs have increasingly tight upper and lower control limits (UCL / LCL) for a number of critical process parameters. These parameters include concentration specific related functions, and many others as associated with CMP slurry blending and distribution operations of a given critical chemical action. 

To achieve this there have been major advances in metrology, varying in areas and principles; but many today are only offline measures or verifications, which are used to meet the required precision and accuracy for these control limits.

To eliminate the need for offline instruments, Exentec has a proven practice of chemical mechanical polishing characterization, where it is possible to use various metrology devices, or combinations of these devices, to achieve the best-in-class in-line metrology driven control with the highest level of precision.

Exentec can use this concert of instruments to achieve real-time online results that have been proven to meet or exceed the levels seen by many offline methods.

Our onboard control technology allows for closed-loop control of a customer-specific semiconductor cmp slurry solution in a blend and distribution operation. Moreover, blend accuracy and production uptime can be maximized with the Exentec Slurry Blender and Distribution System with Transfer Unit. This combined system consists of a Slurry Blender and Distribution system, an external Transfer unit, and a Control Cabinet that controls all units. The Blender receives customer-supplied chemical from the Transfer unit or bulk feed system and facility UPW, performing a blend to tanks inside of the system. Each blend is weight-monitored and can be tracked with flow meters to ensure accuracy.

The Transfer module integrates with two customer-supplied chemical vessels to allow for a constant supply of chemical. When one of the vessels becomes empty, the system automatically switches over to the other approved vessel. Chemical is supplied to the blender by one online vessel with the other vessel in standby.

Advantages

• Fully automated system  
• Low cost of ownership  
• High blend accuracy  
• Flexible and user-friendly HMI  
• System and/or component redundancy to maximize production uptime  
• Automated system flushing  
• Space efficient designs  
• Full blend configuration and manipulation