High Purity Chemical Systems
High Purity Chemical Systems
Exentec offers equipment, support service and technical expertise to meet application needs in the design and manufacturing of high and low purity fluid delivery, chemical blending and state-of-the-art slurry systems for high-tech industries.
We can provide chemical systems for:
- Offload
- Distribution
- (In-line) Blending
- Generation
Our specialties include:
- Metrology-driven closed loop process control
- Flexible, Scalable and Precise Gas & Chemical Delivery and Blending Systems
- Increased Process Control via Blend Concentration and Pressure Control
- Seamless Integration into SCADA with Full I&C Support
Our systems have gone through the strict SEMI Certification process by a third-party reviewer and have been certified in the following:
- S2 Environmental Health and Safety guidelines for Semiconductor manufacturing equipment
- S8 Safety guidelines for ergonomics engineering of Semiconductor manufacturing equipment
- S10 Safety guidelines for risk assessment & evaluation process for Semiconductor process equipment
- S13 Safety guidelines for O & M manuals used with Semiconductor manufacturing equipment
- S14 Equipment fire risk assessment for Semiconductor process equipment
- F47 Specification for Semiconductor processing equipment voltage sag immunity
Cooling Water Cabinets
Exentec's solution is to separate the cooling circuits of fab and tool, and usage of Ultra-Pure-Water (UPW) in the tool circuit.
Precise Environmental Control Chamber
Exentec Precise Environmental Chambers provide very low temperature and humidity tolerances, absolute cleanliness in regards to gaseous and particulate contamination and shielding of acoustic, vibrational and electromagnetic influences.
Precision Climate Control Systems
Exentec provides Precision Climate Control System for the semiconductor industry and nanotechnology and the production of optical storage media requiring a consistently stable process and measurement environments.
Dew Point Control Solution
Exentec offers systems and solutions with displacement gases for the highest requirements regarding cleanliness, temperature stability and dryness.
Ultrapure Water Conditioning
Precise conditioning of fluid media at innovative production environments.