Cyclone
Cyclone
Our deluxe scrubber, complete with all "zero-scrubber-related process tool downtime" features.
The Cyclone is Exentec's deluxe scrubber model and includes all the advanced features that allow Exentec to claim zero scrubber related process tool downtime.
- Eductor Cone: Keeps exhaust line at slightly negative pressure (a nominal draw of 1-2 inches of water.)
- Gas Inlet Devices: Specialized gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions.
- Packed Column: The final polish. Packing requires no maintenance or replacement.
- Second Scrubbing Chamber: Five fine sprays and high velocity nozzles ensure effective removal of impurities.
- First Scrubbing Chamber: Coarse spray, high-flow nozzle coats chamber and removes bulk impurities.
- Fresh Water Input: Strategic position increases efficiency, minimizes water use and eliminates foam.
- Pump: Corrosion resistant, high output and long life. Recirculates 25GPM.
- Sump Geometry: Unique pump input, drain, and fresh water input locations prevent foaming, sediment, and minimize water use.
- Small Footprint: 24.5 inches by 32.5 inches
Encompass
Leveraging our unique value proposition in wet scrubbing, Exentec has introduced Encompass, our first thermal product line.
Cyclone XL
The Cyclone XL features a coarse-spray, high-flow nozzle that coats the first scrubbing chamber and removes bulk impurities.
Gas Inlet Configurations
Exentec provides heated, poly etch CVD, high temperature and epitaxial inlets.