The Cyclone is Exentec's flagship wet abatement system and includes all the advanced features that allow Exentec to claim zero system related process tool downtime. 

Beneficial Features

• Eductor Cone: Keeps exhaust line at slightly negative pressure (a nominal draw of 1-2 inches of water) 
• Gas Inlet Devices: Specialized gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions
• Packed Column: The final polish. Packing requires no maintenance or replacement
• Second Scrubbing Chamber: Five fine sprays and high velocity nozzles ensure effective removal of impurities
• First Scrubbing Chamber: Coarse spray, high-flow nozzle coats chamber and removes bulk impurities 
• Fresh Water Input: Strategic position increases efficiency, minimizes water use and eliminates foam
• Pump: Corrosion resistant, high output and long life. Recirculates 25GPM
• Sump Geometry: Unique pump input, drain, and fresh water input locations prevent foaming, sediment, and minimize water use
• Small Footprint: 24.5 inches by 32.5 inches

Inlet Types

• Heated/CVD: Combining an internally heated, teflon lined and insulated inlet design with our automated plunger can reduce your system related downtime to zero
• Poly Etch CVD Inlet: Highly efficient gas abatement with patented gas inlet devices that minimize restrictions
• High-Temperature Inlet: For high temperature gas stream up to 220ºC
• Epitaxial Inlet: Exentec-specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months
   

Inlet Configurations

• Standard Epitaxial: Only 1 port for Epitaxial and Cyclone, 2 inch PVC slip fit
• Standard 1-to-4 port non-heated Cyclone. Poly 1.5 inch slip-fit PVC inlets are standard but can be modified to incorporate SS reinforced KF 40 flange adapters
• Standard XL: 2 ports only, unheated only, KF 80, SS
• Standard 1 to 4 port heated, Cyclone 1.5 inch SS KF 40 flange