trace analysis

Analysis Service Overview

  • Total organic carbon (TOC) analyzer provides continuous monitoring of organics in ultrapure water
  • Inductively coupled plasma mass spectrometry (ICP-MS) can detect almost all elements of the periodic table 
  • Ion chromatography (IC) is the ideal method for analyzing anions, cations and other polar substances in aqueous media
  • Laser particle measurement can count and size particles as low as 50 nm in water respectively
trace analysis

Ultrapure Water Measuring

The semiconductor industry requires increasingly stringent tolerance limits for contaminants in ultrapure water, especially for critical metals and TOC. Our services include:

 

  • Test of water quality in a process tool or mini-environment for UPW conditioning 
  • Testing the water quality in the overall system from Point Of Entry (POE) to Point Of Use (POU) 
  • Controlling water quality at several transfer points 
  • Pre-qualification of UHP polymer materials (tubes, hoses, membranes etc.) - leaching tests
trace analysis

Air Quality Monitoring

Complex manufacturing processes in electronic and semiconductor industries require high cleanliness of ambient air. Chemical gas-phase contaminations and airborne molecular contaminants can form thin chemical films on critical surfaces. Stringent monitoring of indoor air quality enables compliance with high technology production environments. 

micro-emission-chamber-side

Material Outgassing

Sources of organic outgassing  seals, circuit boards, cable insulation, cleaning agents, coatings, resins and others. Critical compounds are siloxanes, aromatic amines and high boiling aromatic hydrocarbons like phthalates. The product and process control includes: 

 

  • Component and material testing for production control 
  • Screening analysis of organic compounds by thermal desorption 
  • Evaluation of low, medium and high boiling organic compounds 
  • Issuing of Exentec certificates